Pulsed and Pulsed Bias Sputtering: Principles and Applications - Barnat, Edward V. (Sandia National Laboratories, Albuquerque, Usa) - Books - Kluwer Academic Publishers - 9781402075438 - September 30, 2003
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Barnat, Edward V. (Sandia National Laboratories, Albuquerque, Usa)
Pulsed and Pulsed Bias Sputtering: Principles and Applications 2003 edition

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Provides knowledge on the design of the instrumentation for pulsed and pulsed bias sputtering techniques as well as the knowledge for the control of thin film properties using the deposition parameters such as pulsing cycle and duty. This book focuses on the principles of the pulsed and pulsed bias sputter deposition of thin films.

168 pages, 27 black & white illustrations, biography

Media Books     Hardcover Book   (Book with hard spine and cover)
Released September 30, 2003
ISBN13 9781402075438
Publishers Kluwer Academic Publishers
Pages 168
Dimensions 156 × 234 × 11 mm   ·   430 g
Language English  

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